Batch,Diameter,Etch1,Film-Thickness,Etch2,Line-Width,Overlay,Volume
1,0.429,0.43025,49512,308.75,810,1759,315.5
2,0.421,0.433,47101,306.75,824,1746,305.5
3,0.417,0.4285,60023,311.75,765,1482,330.5
4,0.421,0.43775,55428,322.75,933,1857,319.5
5,0.421,0.41725,46442,312.5,686,1844,323.5
6,0.425,0.44075,45539,309.25,1400,1584,314.5
7,0.421,0.42275,51492,311.75,864,1689,319.5
8,0.425,0.43175,47661,301,858,1782,299
9,0.427,0.44225,70638,304.25,252,1572,319.5
10,0.421,0.42875,45944,339.75,255,1377,289
11,0.421,0.43925,56955,330.25,968,1848,315.5
12,0.417,0.4245,37616,314,473,1689,318.5
13,0.421,0.43175,47953,321.25,840,1528,305.5
14,0.427,0.4295,51891,331.75,1034,1913,316.5
15,0.425,0.43025,42608,306,784,1648,298.5
16,0.425,0.44275,60625,316,796,1470,320
17,0.427,0.4275,42359,295.5,746,1398,306.5
18,0.421,0.43925,46554,307.25,1245,1452,304
19,0.421,0.44575,49564,315,728,1377,314.5
20,0.421,0.4425,47824,318.5,870,1433,304
21,0.421,0.43,48516,305.5,842,1573,298.5
22,0.425,0.42675,75703,306,654,1349,307
23,0.433,0.439,53064,314,1003,1732,317.5
24,0.421,0.4215,51152,304,740,1578,307
25,0.421,0.42675,45172,314.5,821,1507,325
26,0.421,0.4275,49898,297.5,620,1628,297.5
27,0.421,0.43825,43420,315.25,200,1440,303
28,0.421,0.4575,49625,318.5,729,1482,316
29,0.417,0.427,48163,314.25,700,1512,319
30,0.421,0.431,46619,310,870,1578,311
31,0.4213,0.43125,48532,305.75,595,1559,303.5
32,0.425,0.443,53965,316.25,943,1979,310.5
33,0.421,0.42975,49753,318.5,929,1755,312.5
34,0.425,0.4305,48741,305.5,831,1610,307
35,0.421,0.44325,54110,310.25,936,1878,301
36,0.421,0.45425,66539,329.25,952,1580,314.5
37,0.433,0.4405,49898,304,961,1792,316.5
38,0.417,0.4345,44963,315.75,742,1223,303
39,0.421,0.4385,47454,311.5,794,1738,307.5
40,0.421,0.449,45574,326.75,901,1550,320.5
41,0.421,0.4485,47744,311.5,852,1498,313.5
42,0.419,0.4345,73536,307,749,1356,301.5
43,0.421,0.42775,47069,304.75,962,1442,306
44,0.421,0.4385,48274,312.75,662,1530,305.5
45,0.425,0.424,45622,298.5,733,1547,296.5
46,0.421,0.4345,49046,311.5,707,1416,306.5
47,0.433,0.451,55492,320.5,900,1601,317
48,0.421,0.43725,47582,310.25,898,1381,300
49,0.421,0.43125,48387,312.5,915,1750,298.5
50,0.425,0.432,50200,339.75,892,1824,310.5
51,0.421,0.4415,50477,308.25,611,1437,314
52,0.421,0.43725,46715,319,621,1255,309.5
53,0.421,0.427,48242,315.25,898,1894,308.5
54,0.425,0.44275,53676,311.75,616,1517,321
55,0.423,0.42875,44882,305,850,1528,306.5
56,0.421,0.44,50493,310,817,1614,311
57,0.433,0.43725,55654,299.5,770,1617,300.5
58,0.421,0.43825,51200,306,852,1764,312.5
59,0.425,0.43925,54512,314.25,831,1797,328.5
60,0.421,0.44525,44352,303,656,1393,314.5
61,0.421,0.42975,49705,316.75,864,1648,314.5
62,0.421,0.43425,44480,298.25,716,1540,295
63,0.429,0.44275,50718,318.25,1029,1718,304.5
64,0.421,0.451,48435,323.5,691,1587,316
65,0.425,0.44125,53596,307,840,1904,312.5
66,0.421,0.44975,48387,321.25,721,1362,312.5
67,0.429,0.438,46301,301.25,793,1323,317.5
68,0.425,0.44775,45890,312.25,872,1393,312.5
69,0.417,0.43175,44850,312.75,831,1400,300
70,0.425,0.42225,42873,311.75,679,1220,303
71,0.425,0.434,43388,314.75,808,1202,320.5
72,0.421,0.43175,42391,301,667,1402,289.5
73,0.417,0.43775,47760,306,730,1503,314.5
74,0.425,0.43075,54399,305.25,821,1759,324
75,0.418,0.4335,51360,303,821,1642,304.5
76,0.421,0.445,60484,314.5,1029,1839,304.5
77,0.425,0.44375,55800,315,654,1610,314
78,0.421,0.44875,53611,316.75,609,1479,307
79,0.421,0.45475,53756,316,768,1648,323.5
80,0.417,0.449,53756,321.5,786,1440,317
81,0.417,0.4375,48226,316,854,1629,312.5
82,0.425,0.4385,49689,313.25,777,1535,316.5
83,0.418,0.437,42262,307.25,1025,1307,306.5
84,0.417,0.43675,44706,300.75,695,1351,310.5
85,0.417,0.4375,43146,308.75,714,1526,292.5
86,0.417,0.442,53048,306.75,662,1519,313.5
87,0.421,0.43175,48740,311.25,840,1542,298
88,0.417,0.43925,48290,307.5,656,1430,324
89,0.417,0.437,49110,309.5,723,1631,312.5
90,0.421,0.4225,46233,300,791,1507,299.5
91,0.417,0.455,48580,312,819,1533,324.5
92,0.421,0.458,52052,315.5,805,1545,318
93,0.417,0.4345,54126,299.5,774,1684,305
94,0.421,0.4425,52824,320.75,940,1671,323
95,0.421,0.435,46120,310,751,1334,311.5
96,0.421,0.43975,50959,319.25,679,1482,311.5
97,0.429,0.4455,58096,315.5,656,1852,328.5
98,0.433,0.44775,50059,321,653,1454,310
99,0.425,0.44575,54046,315.75,704,1264,327.5
100,0.421,0.439,49898,315.5,751,1552,310.5
101,0.429,0.44975,57244,323.25,985,1853,320.5
102,0.421,0.43325,45429,296,866,1407,306
103,0.429,0.443,47808,301.25,1062,1703,306.5
104,0.421,0.4445,48146,318.75,1003,1656,302
105,0.421,0.4385,52518,308.25,788,1699,305.5
106,0.421,0.4435,55267,318,998,1710,322.5
107,0.421,0.44,47262,311,639,1298,304
108,0.421,0.42675,50396,312.75,803,1760,304.5
109,0.425,0.43425,49673,298.5,845,1614,291
110,0.42419,0.439,47374,306.5,847,1652,319
111,0.417,0.43975,49223,315.5,590,1570,311
112,0.421,0.44475,54480,310.25,570,1479,312
113,0.421,0.437,45609,312,819,1465,301
114,0.425,0.439,54560,302.5,625,1437,304.5
115,0.421,0.435,51280,303.25,709,1704,305
116,0.429,0.4445,52808,317.25,681,1727,310
117,0.427,0.436475,47583,314.25,719,1404,320
118,0.429,0.441,48918,311.5,814,1647,305.5
119,0.429,0.4435,53113,305.25,606,1390,315
120,0.421,0.443,49062,305.75,765,1577,304
121,0.417,0.44925,51136,309.5,791,1547,616
122,0.417,0.4395,49110,311.75,649,1414,586
123,0.421,0.436,53483,312.75,579,1521,306
124,0.417,0.43475,50557,312.5,912,1545,307.5
125,0.417,0.4305,46410,305,942,1608,298
126,0.421,0.4395,50204,311.5,836,1701,315
127,0.417,0.43775,44754,317.75,940,1362,312.5
128,0.421,0.438,46233,313.25,793,1398,302
129,0.417,0.43975,44095,301.25,663,1379,300.5
130,0.419,0.42375,45799,307.5,684,1500,299.5
131,0.419,0.45375,55317,323.25,650,1510,320
132,0.417,0.433,46426,302.25,625,1349,314
133,0.417,0.441,53917,315,719,1829,305.5
134,0.417,0.43125,53097,307.25,614,1410,305
135,0.421,0.4365,48532,312,744,1484,301.5
136,0.417,0.41475,46024,308.25,536,1489,301
137,0.421,0.4315,44513,307.25,796,1486,311
138,0.421,0.43575,49942,312.5,924,1664,298.5
139,0.419,0.42475,50284,311.75,714,1545,310.5
140,0.421,0.436,44384,308,803,1339,310
141,0.417,0.43875,51763,309,598,1437,311
142,0.419,0.45425,52711,321.5,662,1393,311.5
143,0.421,0.44675,53370,314.75,858,1802,322.5
144,0.417,0.4325,48275,307.75,642,1578,300
145,0.417,0.4415,45429,311.75,662,1407,299
146,0.429,0.439,49705,305.25,710,1554,299
147,0.419,0.44175,47703,305.75,824,1680,318.5
148,0.417,0.42375,40944,300.75,688,1363,292.5
149,0.421,0.43,44738,301.5,684,1328,306.5
150,0.421,0.44825,48741,308.5,704,1550,325
151,0.421,0.4385,46940,312,728,1466,307
152,0.425,0.4455,55176,313.25,766,1713,308.5
153,0.421,0.433,39594,306,749,1129,309.5
154,0.421,0.437329,49416,311.25,714,1335,309.5
155,0.425,0.44275,48258,318.75,872,1421,313.5
156,0.421,0.43475,45984,319.25,532,1218,312.5
157,0.425,0.42925,50300,304.75,712,1404,287
158,0.417,0.44225,54930,316.5,842,1704,318
159,0.417,0.44175,46024,313.5,742,1554,310
160,0.421,0.426,47599,299.75,681,1309,298
161,0.421,0.43,45976,297.5,760,1158,290
162,0.421,0.42775,44095,310.5,646,1390,310
163,0.417,0.4435,47085,327.75,912,1358,335
164,0.417,0.43375,47438,305.25,807,1729,314.5
165,0.417,0.43125,43002,307.75,892,1507,327
166,0.425,0.425,44223,294.75,502,1110,309.5
167,0.425,0.44325,52776,298,668,1498,312.5
168,0.421,0.43775,50911,308.75,858,1552,302
169,0.421,0.4375,56360,309.75,616,1465,309.5
170,0.421,0.43275,56328,310.75,686,1500,321.5
171,0.421,0.4265,45300,309.75,789,1816,314
172,0.425,0.44275,45976,313.25,761,1265,316.5
173,0.421,0.43925,49712,318,718,1640,296.5
174,0.421,0.44675,47969,315.5,863,1742,312
175,0.425,0.4455,52984,314,910,1824,302
176,0.417,0.44275,57936,315.75,807,1944,317.5
177,0.425,0.43025,46265,306.5,642,1580,309
178,0.417,0.43775,49305,322,744,1680,305
179,0.421,0.4355,54270,317.25,618,1647,332.5
180,0.417,0.43075,49512,318.25,676,1646,300
181,0.417,0.44075,49608,297.75,712,1500,295.5
182,0.417,0.43025,45831,299,730,1433,298
183,0.421,0.43375,48435,304.25,639,1638,313.5
184,0.417,0.432,51152,308,744,1505,302
185,0.417,0.44175,51827,309,861,1456,322.5
186,0.417,0.4365,52647,315,794,1818,319
187,0.417,0.437,48886,310.75,872,1533,312.5
188,0.417,0.44425,50782,310.75,724,1535,323.5
189,0.421,0.44225,50911,306.25,537,1323,306.5
190,0.417,0.441,50252,308.5,796,1542,316.5
191,0.419,0.42725,48757,315.5,606,1387,312
192,0.421,0.43125,49480,309.5,733,1610,308
193,0.421,0.43425,52422,309.75,565,1629,318
194,0.417,0.42775,45204,303.25,653,1367,310
195,0.421,0.43325,50766,310,793,1558,302.5
196,0.417,0.43575,48596,301,744,1500,307.5
197,0.421,0.43525,56344,324,914,1890,310.5
198,0.421,0.43725,54496,320.25,831,1550,317.5
199,0.421,0.4355,38244,317.5,858,1127,310
200,0.421,0.431,46217,294,690,1325,310
201,0.421,0.435,56280,320,814,1759,324
202,0.417,0.44675,51618,327.75,602,1302,324
203,0.417,0.42825,46876,317.75,798,1561,318.5
204,0.421,0.442,50380,318.75,709,1194,315
205,0.433,0.43725,47937,306.25,950,1447,327
206,0.415,0.439,51088,318.5,793,1659,317.5
207,0.421,0.43925,50557,311.5,906,1794,311.5
208,0.425,0.4255,46924,306,663,1407,311.5
209,0.417,0.43525,46313,322.5,891,1384,315
210,0.419,0.4335,54372,303.5,672,1686,310
211,0.421,0.44275,60508,315.75,693,1626,342
212,0.421,0.432,49978,312,828,1608,321.5
213,0.417,0.43175,45044,314,719,1508,302.5
214,0.421,0.433,48837,319,761,1656,317
215,0.417,0.4355,47165,314,892,1540,325.5
216,0.419,0.452,57630,328.25,828,1617,1800
217,0.421,0.44,61303,314.25,721,1864,319
218,0.421,0.4445,52952,327.75,777,1516,319
219,0.421,0.4355,48966,315,721,1566,313.5
220,0.417,0.43475,52727,323,824,1729,310.5
221,0.417,0.4295,43548,308,707,1402,319
222,0.417,0.42875,45349,307.75,662,1577,312
223,0.421,0.4445,53129,324,677,1575,319
224,0.417,0.43225,54274,317.5,628,1564,328.5
225,0.425,0.447,48339,312.25,763,1288,326
226,0.417,0.43425,52100,307.75,822,1768,313
227,0.417,0.43025,49239,315.25,901,1950,323.5
228,0.416,0.438,47438,304.25,782,1530,307
229,0.417,0.43375,48274,308.25,716,1398,309
230,0.417,0.4445,48660,321.5,712,1608,317
231,0.421,0.433,50750,320.5,788,1587,320
232,0.417,0.436,48602,310,808,1692,309
233,0.417,0.44825,49673,320.5,623,1377,310
234,0.421,0.4305,46201,303.75,618,1432,325.5
235,0.417,0.43475,51272,307.25,632,1320,320
236,0.421,0.438,49110,311.5,864,1526,311.5
237,0.417,0.427,53419,307.5,684,1572,310.5
238,0.421,0.42125,42439,303.5,648,1312,302.5
239,0.421,0.42575,41732,305.75,791,1506,303
240,0.417,0.43025,42310,315.5,758,1330,301.5
241,0.417,0.4495,49384,327.5,842,1692,326.5
242,0.417,0.45525,51875,320.5,861,1813,316.5
243,0.413,0.43025,46008,297.5,775,1526,307.5
244,0.417,0.44675,55839,318.5,674,1703,331.5
245,0.421,0.4365,46097,306,905,1522,304.5
246,0.433,0.435,46056,313.75,672,1330,310
247,0.421,0.418,48853,303.5,686,1573,317
248,0.409,0.4265745,52342,313.5,793,1736,319
249,0.413,0.44225,47840,309.75,950,1616,319.5
250,0.409,0.4345,47760,314.5,698,1498,312.5
251,0.413,0.439,48821,309.25,763,1596,326
252,0.409,0.4325,43998,314.5,782,1424,318
253,0.425,0.42475,47985,308.25,738,1577,301.5
254,0.421,0.44675,46088,302.75,665,1176,299
255,0.425,0.4185,46040,309.75,814,1628,286.5
256,0.413,0.4345,47937,306,761,1384,178.5
257,0.417,0.43675,47503,308.25,644,1400,314.5
258,0.413,0.44525,44995,318.25,866,1502,320
259,0.421,0.44175,46410,310.75,714,1484,326
260,0.417,0.43675,49609,314.25,665,1656,302.5
261,0.419,0.44225,48773,426.6666667,866,1580,307.5
262,0.417,0.43275,48902,314.75,873,1563,310
263,0.417,0.441,46972,305.75,842,1575,311.5
264,0.413,0.4245,48419,297.75,726,1514,321
265,0.417,0.4485,54239,322.75,1031,1876,326.5
266,0.417,0.433,47551,302,835,1654,308
267,0.421,0.4435,50187,312.75,658,1414,305.5
268,0.421,0.4585,47069,309.5,747,1404,307.5
269,0.419,0.454,48387,319.25,859,1410,1774
270,0.417,0.437,50300,317,1040,1687,304.5
271,0.413,0.428,49271,304.5,784,1293,312
272,0.413,0.43125,48242,306.5,704,1479,315.5
273,0.413,0.45,56248,326,774,1549,309
274,0.417,0.4395,47607,301.5,660,1496,312
275,0.421,0.42475,46088,295,868,1586,310
276,0.417,0.452,48907,313.75,726,1578,310.5
277,0.417,0.4343335,50702,313.5,752,1488,303
278,0.417,0.4485,50091,321.5,929,1536,310
279,0.413,0.42725,45831,309.75,763,1631,310
280,0.417,0.432,52744,309.75,612,1592,319.5
281,0.413,0.43775,48821,309,803,1640,304
282,0.413,0.44075,49882,302.5,861,1712,311
283,0.417,0.43025,52302,319.25,802,1549,304
284,0.417,0.44,43975,310.75,668,1435,314
285,0.413,0.432,46394,306.75,882,1774,311.5
286,0.413,0.43925,46635,308,817,1120,304
287,0.417,0.43825,51790,305.25,1004,1528,305.5
288,0.417,0.41525,54994,303.5,751,1815,311.5
289,0.421,0.42275,47567,311.25,940,1617,286
290,0.421,0.4425,52132,302.5,756,1694,306.5
291,0.415,0.425,50959,306.25,1186,1832,306
292,0.417,0.43125,49078,312.25,1055,1768,322
293,0.421,0.439,45092,314.75,686,1498,305.5
294,0.421,0.4435,52551,305.75,772,1687,308.5
295,0.413,0.4475,49239,304,721,1564,313
296,0.417,0.436,53836,318.5,775,1785,322
297,0.417,0.4325,45478,318.25,950,1502,307.5
298,0.417,0.44925,45895,315.5,935,1654,329
299,0.421,0.42725,48066,304.75,763,1696,307
300,0.417,0.45175,51859,311.5,709,1638,312.5
301,0.417,0.4295,52406,319.75,722,1549,333
302,0.417,0.43475,51522,317.5,678,1547,337.5
303,0.417,0.4445,47808,324.25,962,1552,316.5
304,0.421,0.44075,52468,312.5,637,1626,317.5
305,0.421,0.43225,48692,299.25,642,1519,298.5
306,0.421,0.442,52518,321,976,1727,320.5
307,0.417,0.4375,53499,305,768,1519,315.5
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614,0.417,0.4365,55621,314.25,1040,2174,326.5
615,0.417,0.439,47891,302.75,1003,1657,320
616,0.413,0.43925,50782,311,696,1458,310.5
617,0.417,0.43675,52631,313.25,1080,1981,310
618,0.433,0.44725,54383,323,998,1783,330
619,0.425,0.44,48757,316,1024,1550,313
620,0.417,0.42875,48564,305.75,877,1880,299
621,0.425,0.44375,48001,310,945,1568,306
622,0.419,0.40975,46956,304.75,1076,1790,313
623,0.425,0.43875,51924,315,870,1684,303
624,0.425,0.42825,46780,302.5,842,1633,315.5
625,0.417,0.4435,46506,306.5,926,1568,307
626,0.417,0.44175,56328,320,1101,2116,304.5
627,0.417,0.42375,42150,313.5,901,1470,323.5
628,0.417,0.43425,45590,304.5,696,1446,309
629,0.421,0.4290525,52310,300.5,796,1687,316.5
630,0.417,0.4295,48644,417.6666667,833,1722,313
631,0.417,0.4555,48580,303.5,772,1419,293.5
632,0.417,0.4355,43548,299.75,807,1423,299.5
633,0.425,0.4215,43580,298.5,940,1516,299.5
634,0.425,0.445,48371,305,891,1568,312
635,0.425,0.44625,47664,315.5,884,1594,322.5
636,0.421,0.43525,45494,311.25,966,1620,305.5
637,0.421,0.438,52100,306,770,1724,314
638,0.421,0.44625,59334,316.25,912,2170,322
639,0.417,0.4425,48258,326,989,1799,314
640,0.421,0.43025,49126,311.75,1003,1526,300
641,0.413,0.4465,47053,316.75,761,1668,321
642,0.413,0.43975,45638,309.5,854,1517,315
643,0.421,0.4205,47374,299,863,1769,315
644,0.421,0.437,46522,300,842,1678,317
645,0.421,0.432,43146,297.75,747,1382,295.5
646,0.417,0.42925,46274,321.75,1018,1519,318
647,0.417,0.423,44208,304.75,980,1608,286.5
648,0.417,0.42525,47245,311.25,984,1535,301.5
649,0.425,0.46625,50139,314.25,910,1561,304
650,0.421,0.432,51747,312.75,872,1549,317.5
651,0.421,0.424,42278,307.25,854,1433,304
652,0.429,0.44425,50548,311.75,864,1496,313
653,0.421,0.42675,42970,294.25,770,1354,287.5